Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D801942 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Yu Liu | 2017-11-07 |
| 9580795 | Sputter source for use in a semiconductor process chamber | Keith A. Miller | 2017-02-28 |
| 9543126 | Collimator for use in substrate processing chambers | — | 2017-01-10 |