Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9845533 | Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity | Sriskantharajah Thirunavukarasu, Karthik Elumalai, Mingwei Zhu | 2017-12-19 |
| 9818624 | Methods and apparatus for correcting substrate deformity | Tuck Foong Koh, Sriskantharajah Thirunavukarasu, Karthik Elumalai, Eng Sheng Peh, Jun-Liang Su | 2017-11-14 |
| 9740111 | Electrostatic carrier for handling substrates for processing | Arvind Sundarrajan, Sriskantharajah Thirunavukarasu, Karthik Elumalai | 2017-08-22 |