Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740111 | Electrostatic carrier for handling substrates for processing | Jen Sern Lew, Sriskantharajah Thirunavukarasu, Karthik Elumalai | 2017-08-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740111 | Electrostatic carrier for handling substrates for processing | Jen Sern Lew, Sriskantharajah Thirunavukarasu, Karthik Elumalai | 2017-08-22 |