Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9845533 | Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity | Sriskantharajah Thirunavukarasu, Karthik Elumalai, Jen Sern Lew | 2017-12-19 |
| 9746678 | Light wave separation lattices and methods of forming light wave separation lattices | Daniel Lee Diehl, Yong Cao, TAI-CHOU PAPO CHEN | 2017-08-29 |