Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799548 | Susceptors for enhanced process uniformity and reduced substrate slippage | Mahadev Joshi, Yuji Aoki | 2017-10-24 |
| 9744640 | Corrosion resistant retaining rings | Simon Yavelberg, Yongqi Hu | 2017-08-29 |
| 9627231 | Methods for bonding substrates | Kadthala Ramaya Narendrnath, Monika Agarwal, Ashish Bhatnagar | 2017-04-18 |