Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799548 | Susceptors for enhanced process uniformity and reduced substrate slippage | Gangadhar Sheelavant, Yuji Aoki | 2017-10-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799548 | Susceptors for enhanced process uniformity and reduced substrate slippage | Gangadhar Sheelavant, Yuji Aoki | 2017-10-24 |