Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9777378 | Advanced process flow for high quality FCVD films | Srinivas D. Nemani, Ludovic Godet, Jun Xue, Ellie Yieh | 2017-10-03 |
| 9773675 | 3D material modification for advanced processing | Ludovic Godet, Srinivas D. Nemani, Jun Xue, Ellie Yieh, Gary E. Dickerson | 2017-09-26 |
| 9620407 | 3D material modification for advanced processing | Ludovic Godet, Srinivas D. Nemani, Jun Xue, Ellie Yieh, Gary E. Dickerson | 2017-04-11 |
| 9595467 | Air gap formation in interconnection structure by implantation process | Jun Xue, Ludovic Godet, Srinivas D. Nemani, Ellie Yieh | 2017-03-14 |