Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520264 | Method and apparatus for clamping and cooling a substrate for ion implantation | Richard J. Hertel, John Robert Fairhurst | 2016-12-13 |
| 9417138 | Gas coupled probe for substrate temperature measurement | Roger B. Fish | 2016-08-16 |