Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530682 | System and apparatus for holding a substrate over wide temperature range | W. Davis Lee | 2016-12-27 |
| 9514916 | Wafer platen thermosyphon cooling system | Gregory Citver | 2016-12-06 |
| 9417138 | Gas coupled probe for substrate temperature measurement | Jeffrey E. Krampert | 2016-08-16 |
| 9391450 | Technique for limiting transmission of fault current | Kasegn D. Takletsadik, Paul J. Murphy | 2016-07-12 |
| 9338829 | Heated platen with improved temperature uniformity | Steven M. Anella | 2016-05-10 |