Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520264 | Method and apparatus for clamping and cooling a substrate for ion implantation | Jeffrey E. Krampert, Richard J. Hertel | 2016-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520264 | Method and apparatus for clamping and cooling a substrate for ion implantation | Jeffrey E. Krampert, Richard J. Hertel | 2016-12-13 |