Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355878 | Substrate processing apparatus | Einstein Noel Abarra | 2016-05-31 |
| 9346171 | Substrate transport apparatus, and system and method for manufacturing electronic device | Kazuhito Watanabe, Satoshi Nakamura, Daisuke Kobinata, Toshiaki Sasaki, Naoyuki Nozawa | 2016-05-24 |
| 9245785 | Substrate processing apparatus | Toshikazu Nakazawa | 2016-01-26 |