Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9422623 | Ion beam generator and ion beam plasma processing apparatus | Yasushi Kamiya, Yuta Konno | 2016-08-23 |
| 9355878 | Substrate processing apparatus | Yukihito Tashiro | 2016-05-31 |
| 9312102 | Apparatus and method for processing substrate using ion beam | Yasushi Kamiya, Yuta Konno | 2016-04-12 |