Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9346171 | Substrate transport apparatus, and system and method for manufacturing electronic device | Kazuhito Watanabe, Yukihito Tashiro, Satoshi Nakamura, Daisuke Kobinata, Naoyuki Nozawa | 2016-05-24 |
| 9252306 | Multilayer thin-film photoelectric converter and its manufacturing method | Masahiro Goto, Wataru Yoshida | 2016-02-02 |