Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373520 | Multilayer film etching method and plasma processing apparatus | Eiji Suzuki, Tomiko Kamada, Hiroto Ohtake | 2016-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373520 | Multilayer film etching method and plasma processing apparatus | Eiji Suzuki, Tomiko Kamada, Hiroto Ohtake | 2016-06-21 |