Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502537 | Method of selectively removing a region formed of silicon oxide and plasma processing apparatus | Akinori Kitamura, Hiroto Ohtake | 2016-11-22 |
| 9412607 | Plasma etching method | Tomiko Kamada, Akinori Kitamura, Hiroto Ohtake, Yutaka Osada, Yuji Otsuka +2 more | 2016-08-09 |
| 9373520 | Multilayer film etching method and plasma processing apparatus | Shota Yoshimura, Tomiko Kamada, Hiroto Ohtake | 2016-06-21 |
| 9352609 | Method for collecting liquid surface residual film, method for transferring liquid pressure using same, collection device therefor, and liquid pressure transfer device using same | Youichiro Yoshii, Sakae Ushiwata | 2016-05-31 |
| 9312073 | Nonaqueous electrolyte solution, and lithium ion secondary battery having the same | Shinako Kaneko, Hitoshi Ishikawa, Yoko Hashizume | 2016-04-12 |
| 9253824 | Steam generator | Kazuhiko Inoue, Shinichi Kaga, Yukimasa Takeda, Akihiko Hirano, Hiroshi Kai +3 more | 2016-02-02 |