Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299540 | Plasma processing apparatus, plasma processing method, and storage medium | Tatsuya Ogi, Wataru Ozawa, Kazuhiro Kanaya | 2016-03-29 |
| 9236230 | Plasma processing apparatus and gas supply method therefor | Yoshiyuki Kato, Norihiko Amikura, Risako Miyoshi | 2016-01-12 |