Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299540 | Plasma processing apparatus, plasma processing method, and storage medium | Wataru Ozawa, Kimihiro Fukasawa, Kazuhiro Kanaya | 2016-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299540 | Plasma processing apparatus, plasma processing method, and storage medium | Wataru Ozawa, Kimihiro Fukasawa, Kazuhiro Kanaya | 2016-03-29 |