Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9240307 | Plasma processing apparatus | Norihiko Amikura | 2016-01-19 |
| 9236230 | Plasma processing apparatus and gas supply method therefor | Yoshiyuki Kato, Norihiko Amikura, Kimihiro Fukasawa | 2016-01-12 |