Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500946 | Sidewall spacer patterning method using gas cluster ion beam | Soo Doo Chae, Youngdon Chang, Il-seok Song | 2016-11-22 |
| 9502209 | Multi-step location specific process for substrate edge profile correction for GCIB system | Hongyu Yue, Vincent Gizzo, Joshua LaRose, Steven P. Caliendo | 2016-11-22 |