Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502209 | Multi-step location specific process for substrate edge profile correction for GCIB system | Hongyu Yue, Noel Russell, Vincent Gizzo, Steven P. Caliendo | 2016-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502209 | Multi-step location specific process for substrate edge profile correction for GCIB system | Hongyu Yue, Noel Russell, Vincent Gizzo, Steven P. Caliendo | 2016-11-22 |