Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500946 | Sidewall spacer patterning method using gas cluster ion beam | Soo Doo Chae, Il-seok Song, Noel Russell | 2016-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500946 | Sidewall spacer patterning method using gas cluster ion beam | Soo Doo Chae, Il-seok Song, Noel Russell | 2016-11-22 |