Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530200 | Method and system for inspection of a patterned structure | Chia-Jen Chen, Hsin-Chang Lee | 2016-12-27 |
| 9429835 | Structure and method of photomask with reduction of electron-beam scatterring | Chia-Jen Chen, Hsin-Chang Lee | 2016-08-30 |
| 9341940 | Reticle and method of fabricating the same | Chia-Jen Chen, Ta-Cheng Lien, Hsin-Chang Lee | 2016-05-17 |