Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418847 | Lithography system and method for haze elimination | Ching-Wei Shen, Kuan-Wen Lin, Chi-Lun Lu, Sheng-Chi Chin, Anthony Yen | 2016-08-16 |
| 9354510 | EUV mask and method for forming the same | Ching-Fang Yu, Sheng-Chi Chin | 2016-05-31 |
| 9305346 | Method and apparatus for efficient defect inspection | Ching-Fang Yu | 2016-04-05 |