CL

Chi-Lun Lu

TSMC: 1 patents #1,374 of 2,623Top 55%
Overall (2016): #438,939 of 481,213Top 95%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9418847 Lithography system and method for haze elimination Ching-Wei Shen, Kuan-Wen Lin, Ting-Hao Hsu, Sheng-Chi Chin, Anthony Yen 2016-08-16