Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418847 | Lithography system and method for haze elimination | Ching-Wei Shen, Kuan-Wen Lin, Chi-Lun Lu, Ting-Hao Hsu, Anthony Yen | 2016-08-16 |
| 9354510 | EUV mask and method for forming the same | Ching-Fang Yu, Ting-Hao Hsu | 2016-05-31 |