Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9512519 | Atomic layer deposition apparatus and method | Chia-Yi Chuang, Hsing-Jui Lee | 2016-12-06 |
| 9437433 | Method and apparatus for cooling wafer in ion implantation process | Kuo-Yuan Ho, Jung-Wei Lee | 2016-09-06 |
| 9378990 | Adjusting intensity of laser beam during laser operation on a semiconductor device | Lee-Te Tseng, Chih-Hsien Ou, Kun-Hsiang Lin, Yi-Hann Chen | 2016-06-28 |
| 9267982 | Processing apparatus and ion implantation apparatus | Shao-Hua Wang, Sheng-Wei Lee | 2016-02-23 |