Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9512519 | Atomic layer deposition apparatus and method | Chia-Yi Chuang, Ming-Te Chen | 2016-12-06 |
| 9343312 | High temperature intermittent ion implantation | Hsin-Wei Wu, Tsun-Jen Chan, Chun-Feng Nieh, Yu-Chi Fu | 2016-05-17 |