Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437433 | Method and apparatus for cooling wafer in ion implantation process | Jung-Wei Lee, Ming-Te Chen | 2016-09-06 |
| 9412595 | Systems and methods for intelligent dispatching for wafer processing | Li-Jen Chen, Chih-Cheng Kao, Shih-Ting Zeng, Yi-Hsiung Lin | 2016-08-09 |