Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412606 | Target dimension uniformity for semiconductor wafers | Han-Wen Liao, Chih-Yu Lin | 2016-08-09 |
| 9384949 | Gas-flow control method for plasma apparatus | Zi-Neng Huang, Chang-Sheng Lee, Shen-Chieh Liu | 2016-07-05 |
| 9362185 | Uniformity in wafer patterning using feedback control | Chung-Hsi Wu, Han-Wen Liao, Chih-Yu Lin | 2016-06-07 |
| 9324578 | Hard mask reshaping | Han-Wen Liao, Chih-Yu Lin | 2016-04-26 |