Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412606 | Target dimension uniformity for semiconductor wafers | Chih-Yu Lin, Cherng-Chang Tsuei | 2016-08-09 |
| 9362185 | Uniformity in wafer patterning using feedback control | Chung-Hsi Wu, Chih-Yu Lin, Cherng-Chang Tsuei | 2016-06-07 |
| 9324578 | Hard mask reshaping | Chih-Yu Lin, Cherng-Chang Tsuei | 2016-04-26 |