Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425109 | Planarization method, method for polishing wafer, and CMP system | Chung-Liang Cheng, Yen-Yu Chen, Wei Zhang | 2016-08-23 |
| 9412671 | Method for controlling processing temperature in semiconductor fabrication | Hsien-Chie Tsai, Fu-Yuan Chang, Hung-Yin Lin, Wen-Che Chang, Chien-Pin Sherman Hsu | 2016-08-09 |
| 9384949 | Gas-flow control method for plasma apparatus | Zi-Neng Huang, Shen-Chieh Liu, Cherng-Chang Tsuei | 2016-07-05 |
| 9362385 | Method for tuning threshold voltage of semiconductor device with metal gate structure | Chung-Liang Cheng, Yen-Yu Chen, Wei-Jen Chen, Wei Zhang | 2016-06-07 |
| 9343315 | Method for fabricating semiconductor structure, and solid precursor delivery system | Chung-Liang Cheng, Chien-Hao Tseng, Yen-Yu Chen, Ching-Chia Wu, Wei Zhang | 2016-05-17 |
| 9227294 | Apparatus and method for chemical mechanical polishing | Chung-Liang Cheng, Yen-Yu Chen, Wei Zhang | 2016-01-05 |
| 9228114 | Composition and method for chemical mechanical polishing | Chung-Liang Cheng, Yen-Yu Chen, Wei Zhang | 2016-01-05 |