Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425109 | Planarization method, method for polishing wafer, and CMP system | Yen-Yu Chen, Chang-Sheng Lee, Wei Zhang | 2016-08-23 |
| 9362385 | Method for tuning threshold voltage of semiconductor device with metal gate structure | Yen-Yu Chen, Wei-Jen Chen, Chang-Sheng Lee, Wei Zhang | 2016-06-07 |
| 9343315 | Method for fabricating semiconductor structure, and solid precursor delivery system | Chien-Hao Tseng, Yen-Yu Chen, Ching-Chia Wu, Chang-Sheng Lee, Wei Zhang | 2016-05-17 |
| 9293334 | N metal for FinFET and methods of forming | Po-Chin Kuo, Hsien-Ming Lee, Weng Chang | 2016-03-22 |
| 9227294 | Apparatus and method for chemical mechanical polishing | Yen-Yu Chen, Chang-Sheng Lee, Wei Zhang | 2016-01-05 |
| 9228114 | Composition and method for chemical mechanical polishing | Yen-Yu Chen, Chang-Sheng Lee, Wei Zhang | 2016-01-05 |