Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9339951 | Resin-releasing jig | Akito Kubo, Kazuaki Ikeda, Yasunori Nagaoka, Kouji Mutou, Noriaki Takami | 2016-05-17 |
| 9330948 | Heater unit, fan filter unit, and substrate processing apparatus | Masaaki Furuya, Munenori Iwami, Takahiko Wakatsuki, Masanori Kondo | 2016-05-03 |