Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330948 | Heater unit, fan filter unit, and substrate processing apparatus | Masaaki Furuya, Munenori Iwami, Takahiko Wakatsuki, Katsuya Yamada | 2016-05-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330948 | Heater unit, fan filter unit, and substrate processing apparatus | Masaaki Furuya, Munenori Iwami, Takahiko Wakatsuki, Katsuya Yamada | 2016-05-03 |