Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9454080 | Spin treatment apparatus | — | 2016-09-27 |
| 9330948 | Heater unit, fan filter unit, and substrate processing apparatus | Munenori Iwami, Takahiko Wakatsuki, Masanori Kondo, Katsuya Yamada | 2016-05-03 |