Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412634 | Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM | Mikio Segawa, Yasushi Taniyama, Shin Kawahisa | 2016-08-09 |
| 9239228 | Wafer mapping apparatus and load port including same | Masahiro Osawa, Toshimitsu Morihana, Mitsutoshi Ochiai | 2016-01-19 |