Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9239228 | Wafer mapping apparatus and load port including same | Mitsuo Natsume, Masahiro Osawa, Toshimitsu Morihana | 2016-01-19 |
| 9230844 | Carrier transfer facilitating device | Takumi Mizokawa | 2016-01-05 |