SK

Shin Kawahisa

SC Sinfonia Technology Co.: 1 patents #13 of 32Top 45%
Overall (2016): #230,413 of 481,213Top 50%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9412634 Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM Mikio Segawa, Yasushi Taniyama, Mitsuo Natsume 2016-08-09