Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9312127 | Method for producing semiconductor apparatus substrate | Tsutomu Ogihara, Daisuke KORI, Yoshinori Taneda, Rie Kikuchi, Seiichiro Tachibana | 2016-04-12 |
| 9312144 | Composition for forming a silicon-containing resist under layer film and patterning process | Tsutomu Ogihara | 2016-04-12 |