Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411225 | Photo acid generator, chemically amplified resist composition, and patterning process | Masaki Ohashi, Masahiro Fukushima, Koji Hasegawa | 2016-08-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411225 | Photo acid generator, chemically amplified resist composition, and patterning process | Masaki Ohashi, Masahiro Fukushima, Koji Hasegawa | 2016-08-09 |