Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482953 | Lithography apparatus having effective thermal electron enhancement unit and method of forming pattern using the same | Cha-Won Koh, Jeon Il Lee, Hyun-Woo Kim, Jin-Jun Park | 2016-11-01 |