Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520289 | Methods of forming a pattern of a semiconductor device | Cha-Won Koh, Hyun-Woo Kim | 2016-12-13 |
| 9482953 | Lithography apparatus having effective thermal electron enhancement unit and method of forming pattern using the same | Cha-Won Koh, Jeon Il Lee, Su Min Kim, Hyun-Woo Kim | 2016-11-01 |