Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520289 | Methods of forming a pattern of a semiconductor device | Jin-Jun Park, Hyun-Woo Kim | 2016-12-13 |
| 9482953 | Lithography apparatus having effective thermal electron enhancement unit and method of forming pattern using the same | Jeon Il Lee, Su Min Kim, Hyun-Woo Kim, Jin-Jun Park | 2016-11-01 |
| 9412604 | Methods of manufacturing semiconductor device | Hyun-Woo Kim, Jong Soo Kim, Jin Kyu Park, Hyung-Rae Lee | 2016-08-09 |