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Methods of forming semiconductor devices, including performing a heat treatment after forming a metal layer and a high-k layer |
Weon-Hong Kim, Moon-Kyun Song |
2016-08-30 |
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Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus |
Yong Min Yoo, Dae Youn Kim, Young-Hoon Kim, Dae-Jin Kwon, Weon-Hong Kim |
2016-08-02 |
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Semiconductor device, method for fabricating the same, and memory system including the semiconductor device |
Kook Tae Kim, Young-Tak Kim, Ho-Sung Son, Ji-Hye Yi, Chul Lee |
2016-04-12 |
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Semiconductor device and method for fabricating the same |
Wei-Hsiung Tseng, Ju-Youn Kim, Jong Ho Lee, Hye-Lan Lee, Yong-Ho Ha |
2016-03-15 |
| 9275993 |
Semiconductor device and method for fabricating the same |
Weon-Hong Kim, Moon-Kyun Song |
2016-03-01 |