Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406502 | Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus | Seok-Jun Won, Yong Min Yoo, Dae Youn Kim, Young-Hoon Kim, Weon-Hong Kim | 2016-08-02 |