Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406502 | Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus | Seok-Jun Won, Dae Youn Kim, Young-Hoon Kim, Dae-Jin Kwon, Weon-Hong Kim | 2016-08-02 |
| 9330899 | Method of depositing thin film | In-Soo Jung, Eun-Kee Hong, Seung Woo Choi, Dong Seok Kang, Pei-Chung Hsiao | 2016-05-03 |