Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9360662 | Optical measurement system and method for measuring critical dimension of nanostructure | Sergey Nikolaevich Koptyaev, Michael Nikolaevich Rychagov | 2016-06-07 |
| 9322640 | Optical measuring system and method of measuring critical size | Sergey Nikolaevich Koptyaev, Alexander Vyacheslavovich Shcherbakov, Alexey Dmitrievich Lantsov | 2016-04-26 |