Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9400254 | Method and device for measuring critical dimension of nanostructure | Alexander Shcherbakov, Maxim Vladimirovich Riabko | 2016-07-26 |
| 9322640 | Optical measuring system and method of measuring critical size | Sergey Nikolaevich Koptyaev, Maxim Vladimirovich Ryabko, Alexander Vyacheslavovich Shcherbakov | 2016-04-26 |