Issued Patents 2016
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9511998 | MEMS device having a getter | Ashwin Samarao, Ando Feyh, Gary Yama, Andrew Graham, Bongsang Kim +1 more | 2016-12-06 |
| 9476779 | Sensor with an embedded thermistor for precise local temperature measurement | Andrew Graham, Ando Feyh | 2016-10-25 |
| 9469522 | Epi-poly etch stop for out of plane spacer defined electrode | Andrew Graham, Gary Yama | 2016-10-18 |
| 9423303 | MEMS infrared sensor including a plasmonic lens | Ashwin Samarao, Ando Feyh, Gary Yama, Fabian Purkl | 2016-08-23 |
| 9368658 | Serpentine IR sensor | Fabian Purkl, Gary Yama, Ando Feyh | 2016-06-14 |
| 9274005 | Device and method for increasing infrared absorption in MEMS bolometers | Ashwin Samarao | 2016-03-01 |
| 9255328 | Metamaterial and method for forming a metamaterial using atomic layer deposition | Fabian Purkl, John Provine, Gary Yama, Ando Feyh | 2016-02-09 |
| 9242850 | Out-of-plane spacer defined electrode | Andrew Graham, Gary Yama | 2016-01-26 |
| 9236522 | MEMS infrared sensor including a plasmonic lens | Ashwin Samarao, Ando Feyh, Fabian Purkl, Gary Yama | 2016-01-12 |
| 9236555 | Piezoelectric based MEMS structure | Po-Jui Chen, Ando Feyh | 2016-01-12 |