Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9511998 | MEMS device having a getter | Ashwin Samarao, Gary O'Brien, Ando Feyh, Gary Yama, Bongsang Kim +1 more | 2016-12-06 |
| 9476779 | Sensor with an embedded thermistor for precise local temperature measurement | Ando Feyh, Gary O'Brien | 2016-10-25 |
| 9469522 | Epi-poly etch stop for out of plane spacer defined electrode | Gary Yama, Gary O'Brien | 2016-10-18 |
| 9455353 | Substrate with multiple encapsulated devices | Po-Jui Chen, Gary Yama, Matthieu Liger | 2016-09-27 |
| 9302906 | Capacitive pressure sensor and method | Ando Feyh | 2016-04-05 |
| 9266716 | MEMS acoustic transducer with silicon nitride backplate and silicon sacrificial layer | Ando Feyh | 2016-02-23 |
| 9242850 | Out-of-plane spacer defined electrode | Gary Yama, Gary O'Brien | 2016-01-26 |
| 9233842 | Passivation layer for harsh environments and methods of fabrication thereof | Ando Feyh, Fabian Purkl, Gary Yama | 2016-01-12 |